Method of displaying measurement result in inspection process and system thereof, and computer program

ABSTRACT

A method of displaying a measurement result in an inspection process using network, the method includes a first step that a host, which intensively controls and manages a device for inspecting a lot to be processed in one or a plurality of steps, transmits to the device a condition of measuring a lot determined to be put in, a second step that the device measures the lot based on the measurement condition received via the network and then obtains measured data, a third step that the host determines whether the measured data received via the network is abnormal or normal based on a predetermined assessment standard and then produces a result of assessing a measured value so as to transmit the result to the device and a fourth step that the device provides a display corresponding to the result of assessing the measured value in accordance with the received result of assessing the measured value as well as a previously registered display standard.

Notice: More than one reissue application has been filed for the reissueof U.S. Pat. No. 6,990,421. The reissue applications are thisapplication (U.S. application Ser. No. 12/018,757), filed on Jan. 23,2008, which is a reissue of U.S. Pat. No. 6,990,421, and U.S.application Ser. No. 12/959,289, filed on Dec. 2, 2010, which is adivisional reissue of U.S. Pat. No. 6,990,421.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method of checking a result of ameasurement and more particularly to a method of displaying ameasurement result in an inspection process using a network and a systemthereof and further to a computer program.

2. Description of Related Art

Conventionally, one host terminal is installed for one measuring devicein an operational environment in an inspection process in a factory formanufacturing things such as semiconductors. Also, regarding themeasuring device, there are measuring devices equipped with signaltowers and with terminals in a mixed manner in the environment.Moreover, since data standards in respective processes are different,the host assesses measured data for validation thereof. In order for anoperator to determine whether it is possible to bring (hand over) a(n)(intermediate) product to a next step, the host terminal recognizes acorresponding measurement result by using an application of a processmanagement system and determines whether a lot can be brought over to anext step.

FIG. 6 is a drawing showing a flow of operational procedures in aconventional inspection process.

A process management server 1) determines the input of a targeted lotfrom a host terminal. Then, a device control server 2) makes areservation with a device. The device 3) accepts the reservation for themeasurement. The device control server 4) instructs conditions and astart of measurement. The device then 5) starts measurement and 6)advises measured data. The device control server 7) obtains the measureddata. The process management server 8) assesses the measured data, andthe host terminal confirms the measurement result. When the measurementresult is acceptable, the lot is carried to a next step. When themeasurement result is not acceptable, bringing the lot to the next stepis suspended.

In some cases, an appearance inspection is performed with respect to alot by each category based on a result of measuring electricalcharacteristics. The content of the lot is classified based on theresult of measuring the electrical characteristics and the appearanceinspection so as to be accommodated in an accommodating magazine. Inother cases, the content of a lot is sealed and shaped according tocategories based on a result of measuring electrical characteristics.

However, technologies of the prior art have the following problems. Whenmeasurement of a product is completed, a measuring device equipped witha signal tower can be checked. However, it is not possible to instantlyperform validation of the measured result by referring to theappearance. Also, when an inspector of an inspection process is incharge of a plurality of devices and gets stuck with a device that takesa few minutes to measure one lot, the inspector may be away from othermeasuring devices. Moreover, an operator has to take an action (requiredprocessing) after a host terminal confirms whether it has checked if themeasurement-completed lot satisfies the quality standard; whether thelot should be brought over to the next step; and whether the lot shouldbe reported to an engineer.

The present invention has been achieved in light of the above problemsand intends to provide a method of displaying a measurement result in aninspection process. The method allows a host via a network to assess aresult of inspecting a lot and then has an inspection device display theresult. The method also enables an interlock to the next step, and asystem thereof as well as a computer program.

SUMMARY OF THE INVENTION

An embodiment of the present invention resides in a method of displayinga measurement result in an inspection process using a network. Themethod includes a first step that a host, which intensively controls andmanages a device for inspecting a lot to be processed in one or aplurality of processes, transmits to the device a condition of measuringa lot determined to be put in. The method includes a second step thatthe device measures the lot based on the measurement condition receivedvia the network and then obtains measured data. The method includes athird step that the host determines whether the measured data receivedvia the network is abnormal or normal based on a predeterminedassessment standard and then produces a result of assessing a measuredvalue so as to transmit the result to the device. The method includes afourth step that the device provides a display corresponding to theresult of assessing the measured value in accordance with the receivedresult of assessing the measured value as well as a previouslyregistered display standard.

An embodiment of the present invention resides in the method ofdisplaying a measurement result in an inspection process, wherein thethird step includes a step that when the result of assessing themeasured value is abnormal, a host terminal connected to the hostdisplays that the lot is abnormal, and when the result of assessing themeasured value is normal, the host terminal displays that the lot startsinto a next process.

An embodiment of the present invention resides in the method ofdisplaying a measurement result in an inspection process, wherein thefourth step includes a fifth step of providing a display correspondingto the result of assessing the measured value and a display of anoperating condition showing the device being operating or not operating,by lighting up, turning off, or flashing four colors of a four colordisplay unit connected to the device, the unit including a first displayportion, a second display portion, a third display portion and a fourthdisplay portion of colors different from each other.

An embodiment of the present invention resides in the method ofdisplaying a measurement result in an inspection process, wherein thefourth step includes a step of providing a display showing the operatingcondition of the device and a display corresponding to the result ofassessing the measured value on a device monitor connected to thedevice.

An embodiment of the present invention resides in the method ofdisplaying a measurement result in an inspection process, wherein thethird step includes a step of not transmitting an instruction totransfer a corresponding lot or of transmitting an instruction totransfer the lot to a buffer, to a transferring portion connected to thehost via the network in case that the result of assessing the measuredvalue is abnormal while transmitting to the transferring portion aninstruction to transfer the corresponding lot and also transmitting to aprocessing device for a next process an instruction to start processingof the corresponding lot in case that the result of assessing themeasured value is normal.

An embodiment of the present invention resides in the method ofdisplaying a measurement result in an inspection process, wherein thesecond step includes a step of reading a lot number such as a bar codeby means of an identification means mounted in the device and thenadding the lot number to the measured data so as to transmit the data tothe host, and wherein the third step includes a step of including thelot number in the produced result of assessing the measured value.

An embodiment of the present invention resides in a computer programcapable of implementing an operation by the method of displaying ameasurement result in an inspection process, wherein each step in themethod of displaying a measurement result in an inspection process isencoded.

An embodiment of the present invention resides in a system of displayinga measurement result in an inspection process using a network. Thesystem includes a device that measures a lot based on a measurementcondition corresponding to the inspection process so as to obtainmeasured data; and a host that intensively controls and manages thedevice in one or a plurality of processes. The host further includes adevice control server that transmits to the device via the network themeasurement condition of a lot determined to be put in; and a processesmanagement server that assesses the measured data, which is received viathe network, based on a predetermined assessment standard, and thenproduces a result of assessing a measured value so as to transmit theresult to the device. The device provides a display corresponding to theresult of assessing the measured value in accordance with the receivedresult of assessing the measured value and a previously registereddisplay standard.

An embodiment of the present invention resides in the system ofdisplaying a measurement result in an inspection process, wherein thehost includes a host terminal connected to the network, and the hostterminal displays that the lot is abnormal when the result of assessingthe measured value is abnormal while displaying that the lot starts intoa next process when the result of assessing the measured value isnormal.

An embodiment of the present invention resides in the system ofdisplaying a measurement result in an inspection process, wherein thedevice includes a four color display unit including a first displayportion, a second display portion, a third display portion and a fourthdisplay portion of colors different from each other. The four colordisplay unit provides a display corresponding to the result of assessingthe measured value and a display showing an operating condition of thedevice operating or not operating, by lighting up, turning off orflashing four colors of the four color display unit.

An embodiment of the present invention resides in the system ofdisplaying a measurement result in an inspection process, wherein thedevice includes a device monitor, and the device monitor provides thedisplay showing the operating condition of the device and the displaycorresponding to the result of assessing the measured value.

An embodiment of the present invention resides in the system ofdisplaying a measurement result in an inspection process, wherein thehost does not transmit an instruction to transfer the corresponding lotor transmits an instruction to transfer the lot to a buffer, to atransferring portion connected to the host via the network in case thatthe result of assessing the measured value is abnormal whiletransmitting to the transferring portion an instruction to transfer thecorresponding lot and also transmitting to a processing device for anext process an instruction to start processing of the corresponding lotin case that the result of assessing the measured value is normal.

An embodiment of the present invention resides in the system ofdisplaying a measurement result in an inspection process, wherein thedevice includes an identification means for reading a lot number such asa bar code, wherein the identification means reads the lot number andthen adds the number to the measured data so as to transmit the data tothe host, and wherein the processes management server includes the lotnumber in the produced result of assessing the measured value.

An embodiment of the present invention resides in a lot processingsystem using the system of displaying a measurement result in aninspection process., The system includes a host that controls andmanages a device for inspecting a lot in each of a plurality ofprocesses, wherein the host does not transmit an instruction to transfera corresponding lot or transmits an instruction to transfer the lot to abuffer, to a transferring portion connected to the host via network incase that a result of assessing a measured value of the lot is abnormalwhile transmitting to the transferring portion an instruction totransfer the corresponding lot and also transmitting to a processingdevice for a next process an instruction to start processing of thecorresponding lot in case that the result of assessing the measuredvalue is normal.

An embodiment of the present invention resides in a host server for usein an inspection process using a network. The host server includes adevice control server that controls a device of the inspection processin one or a plurality of processes via the network and transmits to thedevice a condition of measuring a lot determined to be put in and aprocesses management server that intensively manages the device,assesses measured data, which is received via the network, based on apredetermined assessment standard, and then produces a result ofassessing a measured value so as to transmit the result to the device.

An embodiment of the present invention resides in the host server,wherein the processes management server does not transmit an instructionto transfer a corresponding lot or transmits an instruction to transferthe lot to a buffer, to a transferring portion connected to the host viathe network in case that the result of assessing the measured value isabnormal while transmitting to the transferring portion an instructionto transfer the corresponding lot and also transmitting to a processingdevice for a next step an instruction to start processing of thecorresponding lot in case that the result of assessing the measuredvalue is normal.

An embodiment of the present invention resides in a device forimplementing an inspection in an inspection process using a network. Thedevice includes a four color display unit including a first displayportion, a second display portion, a third display portion and a fourthdisplay portion of colors different from each other; and a main unit,incorporated in the device, that transmits to a host server via thenetwork measured data obtained by measuring a lot based on a measurementcondition corresponding to the inspection process. The four colordisplay unit provides a display corresponding to a result of assessing ameasured value and a display showing an operating condition of the mainunit of the device operating or not operating by lighting up, turningoff or flashing the four colors in accordance with the result ofassessing the measured value received by the main unit of the devicefrom the host server via the network and a previously registered displaystandard.

An embodiment of the present invention resides in the device, furtherincluding a device monitor that provides the display showing theoperating condition of the main unit of the device and the displaycorresponding to the result of assessing the measured value.

An embodiment of the present invention resides in the device, furtherincluding an identification means for reading a lot number such as a barcode and then adding the number to the measured data so as to transmitthe data to the host server, wherein the device monitor displays the lotnumber included in the result of assessing the measured valuetransmitted from the host server.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a drawing showing a schematic structure of a system ofdisplaying a measurement result in an inspection process according to anembodiment of the invention.

FIG. 2 is a drawing showing the flow of the operation by a method ofdisplaying a measurement result in an inspection process according tothe embodiment of the invention.

FIG. 3 is a drawing showing a state of operation in each step in FIG. 2.

FIG. 4 is a drawing showing the relationship between displays by asignal tower in FIG. 1 and steps in FIG. 2.

FIG. 5 is a drawing showing an example of the correspondence betweenmessages shown by a device monitor connected to a host terminal and adevice in FIG. 1 and the signal tower.

FIG. 6 is a drawing showing the flow of operational procedures in aninspection process of the prior art.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

An embodiment of the invention is explained in detail below withreference to drawings. FIG. 1 illustrates a schematic structure of asystem of displaying a measurement result in an inspection processaccording to this embodiment.

As shown in FIG. 1, the system of displaying a measurement result in theinspection process according to this embodiment includes a host (hostserver) “A” including a process management server 10 and a devicecontrol server 20, a host terminal 30 and a device (measuring device) 40including a signal tower (four (4)-lamp light and four color displayunit) 40T. The device (main unit of the device) 40 measures each lot(carrier) 50.

The host “A” stores a host management table including a machine type ofthe device 40, step numbers, items for inspection (the thickness and thewidth, for example) and subjects of inspection (the film thickness andthe line width, for example); a process flow (a flow sheet); and a lotprogress/processing log. Moreover, the host “A” determines the input ofa targeted lot from the host terminal 30, reserves a processing port andthen instructs conditions of measurement. As the measurement conditions,parameters (measurement conditions) such as a processing recipe, thenumber of points of measurement and the location of a wafer within acarrier to be measured are set. Furthermore, the host “A” obtainsmeasured data from the device 40, assesses the measured data and thentransmits a result of assessing a measured value.

Moreover, the device 40 includes a device monitor (not shown in thedrawing) for displaying information such as an abnormal lot number.

Next, a method using the system of displaying a measurement result in aninspection process is explained.

FIG. 2 is a drawing showing a flow of operation by a method fordisplaying a measurement result in an inspection process according tothis embodiment.

The host “A” determines an input of a targeted lot from the hostterminal 30 (step S1).

The host “A” reserves a processing port and instructs measurementconditions (step S2). As the measurement conditions, parameters(measurement conditions) such as a processing recipe, the number ofpoints of measurement and the location of a wafer within a carrier to bemeasured are set.

The device 40 accepts the reservation for the measurement (step S3).

The host “A” instructs a start of the measurement (step S4).

The device 40 starts measurement (step S5) and advises the host “A” ofmeasured data (step S6).

The host “A” obtains the measured data (step S7), assesses the measureddata (step S8) and then transmits a result of assessing a measured value(an instruction for displaying the result of assessing the measuredvalue) (step S9).

When the result of assessing the measured value is abnormal (when theassessment result is abnormal in step S8), the device flashes a redlight of the signal tower or has the device monitor to display theabnormal lot number (step S10).

When the result of assessing the measured value is normal (when theassessment result is normal in step S8), the device flashes a yellowlight and shows that the measurement result is normal (step S11).

FIG. 3 is a drawing showing the state of operation in each step shown inFIG. 2.

As shown in FIG. 3, step S1 implements ‘a standby (to wait for a lot tobe carried in when a port is available)’, and step S3 implements ‘apreliminary processing.’ As shown in this preliminary processing P01,operation shifts in the order of waiting for the lot transfer (WAIT)(step S3a), a carrier cassette device (RESERVE), receiving aninstruction for a start from the host “A” (step S3b) and waiting for thestart of processing at the port (STANDBY). Step S5 implements ‘an actualprocessing (to implement an inspection in accordance with theinstruction by the host “A” in step S2).’

Steps S7 to S10 serve as ‘a later processing.’ Specifically, the host“A” obtains measured data (step S7), assesses the measured data (stepS8) and then transmits a result of assessing a measured value(instruction for displaying the result of assessing the measured value)(step S9). When the result of assessing the measured value is abnormal(when the assessment result is abnormal in step S8), the device flashesthe red light of the signal tower or has the device monitor to displaythe abnormal lot number (step S10).

Step S2, step S4 and step S6 each display ‘transmitting and receiving’status between the host “A” and the device 40. More specifically, thehost “A” executes step S2: reserving the processing port and instructingthe measurement conditions, and step S4: instructing the start ofmeasurement. The device 40 executes step S6: advising the host “A” ofthe measured data.

FIG. 4 is a drawing showing the relationship between displays of thesignal tower 40T shown in FIG. 1 and the steps shown in FIG. 2.

The signal tower 40T is a four (4)-lamp light 40T including a blue colordisplay portion (a first display portion) C1, a green color displayportion (a second display portion) C2, a yellow color display portion (athird display portion) C3 and a red color display portion (a fourthdisplay portion) C4.

In step S1 through step S11, the blue color display portion C1 islighted when the device 40 is under control of the host “A”, which meansthat on-line processing is executable. Moreover, when the blue colordisplay portion C1 is “off”, it indicatesthat manual measurements areexecutable.

In step S5, the green color display portion C2 is lighted when thedevice 40 executes processing, which means that measurements are beingconducted. Moreover, when the green color display portion C2 is “off”,it indicates that the device 40 is not operating.

In step S11, the yellow color display portion C3 flashes when themeasurement result in step S8 is normal. This means a normal stateassuring that the measurement processing is completed normally and allthe measured data falls within the range of a standard quality.Moreover, on the other hand, the device monitor displays an abnormal lotnumber when an abnormal operation occurs and also the operatingcondition of the device 40 such as being measuring or not operating.

In step S10, when an abnormal operation occurs in the device 40, or whenthe measured result is abnormal as a result of reserving the processingport and instructing the measurement conditions in step S2 and also as aresult of instructing the start of measurement in step S4, the red colordisplay portion C4 flashes.

As described above, using the first display portion C1 through thefourth display portion C4 of the four (4)-lamp light 40T enables adisplay showing an operating condition of the device 40 operating or notoperating and also a display showing that the result of assessing themeasured value of the lot 50 is normal or abnormal.

FIG. 5 is a drawing showing an example of correspondence between thesignal tower 40T and messages shown by the device monitor connected tothe host terminal 30 and the device 40 shown in FIG. 1.

FIG. 5 shows a message number D1, a step number (sequence) D2, a messageD3 and a signal tower display D4.

‘S2’ in the sequence D2 shows a result of step S2, which specificallycorresponds to any one of the following occasions:

when the main unit of the device 40 does not have a recipe matching therecipe information designated by the host;

when a designated device port is not in an usable condition;

when the designated device port already receives an instruction foranother lot 50;

when inadequacy is found with the recipe information (points ofmeasurement, the number of points of measurement etc.) designated by thehost “A”;

when another lot 50 is already processed at the designated device port;and

when the device 40 terminates processing and is then waiting for theprocessed lot 50 to be transferred from the port. The signal towerdisplay D4 corresponds to flashing of the red color display portion C4shown in FIG. 4.

‘S4’ in the sequence D2 shows a result of step S4, which specificallycorresponds to any one of the following occasions:

-   -   when the device 40 is not in a state capable of executing        processing;    -   when the designated device port has not received a reservation        for the lot 50 (regardless of the presence of the lot 50);    -   when another lot 50 is already processed at the designated        device port; and    -   when the device 40 terminates processing and is then waiting for        the processed lot 50 to be transferred from the port. The signal        tower display D4 corresponds to flashing of the red color        display portion C4 shown in FIG. 4.

‘S10’ in the sequence D2 corresponds to step S10, specificallycorresponding to a case that even one bit of data of the measured datafalls outside of the range of the product quality standard establishedinside a company. The signal tower display D4 corresponds to flashing ofthe red color display portion C4 shown in FIG. 4.

‘S11’ in the sequence D2 corresponds to step S11, specificallycorresponding to a case that all the measured data falls within therange of the product quality standard established inside a company. Thesignal tower display D4 corresponds to flashing of the blue colordisplay portion C1 and that of the green color display portion C2 shownin FIG. 4. Moreover, the yellow color display portion C3 also flashes(not shown in the drawing).

Furthermore, when the result of assessing the measured value isabnormal, the host “A” does not transmit an instruction to transfer thecorresponding lot 50 or transmits an instruction to transfer the lot toa buffer as its destination, to a transferring portion (not shown in thefigure) connected to the host “A”. When the result of assessing themeasured value is normal, the host “A” transmits to the transferringportion an instruction to start transfer of the corresponding lot 50 andalso transmits to a processing device for the next step an instructionto start processing of the lot 50. The above instruction for thetransfer enables an abnormal lot to be promptly processed.

Moreover, by incorporating an identification means (not shown in thedrawing) for reading a lot number such as a bar code and RFID, thedevice 40 can read a lot number, add it to measured data and then sendit to the host “A”. Then, by adding the lot number to a result ofassessing a measured value, the host “A” can easily confirm that the lot50 is to be normal or abnormal.

In addition, the invention is not limited to this embodiment and isapplicable to a method of displaying a measurement result in aninspection process appropriate in applying this invention, a systemthereof and a computer program.

Moreover, the number, location and shape of each of the above structuralmembers is not limited to the ones defined in the above embodiment andcan be any number, location and shape appropriate in implementing theinvention.

Furthermore, in the drawings, the same structural elements are denotedwith the same reference numerals.

Configured as above, the invention exhibits the following advantages.

In an inspection process relying on work by an operator, it no longerhappens that a lot is left and remains in a port of a device and anoperator waits for the next measurement.

An operator can promptly take the next action on a measured lot, such asbringing the lot to the next step or informing a relevant department ofthe occurrence of an abnormal condition. Consequently, it is possible torestrain slowdown in processing a lot attributable to human-causedfactor that arises in the flow of operation for a lot in an inspectionprocess.

When the invention is adaptable to a standard set by an organization inthe semiconductor industry such as the Semiconductor Equipment andMaterials International (SEMI), a part of the process is operated by anon-line network, facilitating such processes thereby to be entrusted toan outside company.

No special pass/fail flags are necessary by managing an inspectiondevice with a host. Moreover, it does not happen that an NG lot istransferred to the next step (could be transferred but not processed).Relying on information of a signal tower, an operator of the device caneasily recognize and grasp acceptability of a lot, thereby processing atargeted lot.

1. A method of displaying a measurement result in an inspection processusing a network, the method comprising: transmitting to a device ameasurement condition of a lot determined to be used; measuring the lotbased on the measurement condition received via a network and obtainingmeasured data; determining whether or not the measured data received viathe network is abnormal or normal based on a predetermined assessmentstandard and producing a result of assessing a measured value so as totransmit the result to the device; and providing a display correspondingto the result of assessing the measured value in accordance with thereceived result of assessing the measured value as well as a previouslyregistered display standard, wherein the determining step includesdisplaying that the lot is abnormal, when the result of asserting themeasured value is abnormal and displaying that the lot starts into anext process when the result of assessing the measured value is normal.2. The method of displaying a measurement result in an inspectionprocess according to claim 1, wherein the providing step includesproviding a display showing the operating condition of the device and adisplay corresponding to the result of assessing the measured value on adevice monitor connected to the device.
 3. The method of displaying ameasurement result in an inspection process according to claim 1,wherein the determining step includes not transmitting an instruction totransfer a corresponding lot or of transmitting an instruction totransfer the lot to a buffer, to a transferring portion connected to ahost via the network in case that the result of assessing the measuredvalue is abnormal while transmitting to the transferring portion aninstruction to transfer the corresponding lot and also transmitting to aprocessing device for a next process an instruction to start processingof the corresponding lot in case that the result of assessing themeasured value is normal.
 4. The method of displaying a measurementresult in an inspection process according to claim 1, wherein themeasuring step includes reading a lot number including a bar code by anidentification mounted in the device and then adding the lot number tothe measured data so as to transmit the data to a host, and wherein thedetermining step includes including the lot number in the producedresult of assessing the measured value.
 5. A computer program embodiedin a non-transitory computer-readable medium capable of implementingoperation by the method of displaying a measurement result in aninspection process according to claim 1, further comprising encodingeach step.
 6. A method of displaying a measurement result in aninspection process using a network, the method comprising: transmittingto a device a measurement condition of a lot determined to be used;measuring the lot based on the measurement condition received via anetwork and obtaining measured data; determining whether or not themeasured data received via the network is abnormal or normal based on apredetermined assessment standard and producing a result of assessing ameasured value so as to transmit the result to the device; and providinga display corresponding to the result of assessing the measured value inaccordance with the received result of assessing the measured value aswell as a previously registered display standard, wherein the providingstep includes providing a display corresponding to the result ofassessing the measured value and a display of an operating conditionshowing the device operating or not operating, by lighting up, turningoff, or flashing four colors of a four color display unit, connected tothe device, the unit, including a first display portion, a seconddisplay portion, a third display portion and a fourth display portion ofcolors different from each other.
 7. A system of displaying ameasurement result in an inspection process using a network, the systemcomprising: a device that measures a lot based on a measurementcondition corresponding to the inspection process so as to obtainmeasured data; and a host that intensively controls and manages thedevice in one or a plurality of steps, the host further comprising: adevice control server that transmits to the device via the network themeasurement condition of a lot determined to be used; and a processmanagement server that assesses the measured data, which is received viathe network, based on a predetermined assessment standard, and thenproduces a result of assessing a measured value so as to transmit theresult to the device, wherein the device provides a displaycorresponding to the result of assessing the measured value inaccordance with the received result of assessing the measured value anda previously registered display standard, and wherein the host comprisesa host terminal connected to the network, and the host terminal displaysthat the lot is abnormal when the result of assessing the measured valueis abnormal while displaying that the lots starts into a next processwhen the result of assessing the measured value is normal.
 8. The systemof displaying a measurement result in an inspection process according toclaim 7, wherein the device comprises a device monitor, and the devicemonitor provides the display showing the operating condition of thedevice and the display corresponding to the result of assessing themeasured value.
 9. The system of displaying a measurement result in aninspection process according to claim 7, wherein the host does nottransmit an instruction to transfer the corresponding lot or transmitsan instruction to transfer the lot to a buffer, to a transferringportion connected to the host via the network in case that the result ofassessing the measured value is abnormal while transmitting to thetransferring portion an instruction to transfer the corresponding lotand also transmitting to a processing device for a next process aninstruction to start processing of the corresponding lot in case thatthe result of assessing the measured value is normal.
 10. The system ofdisplaying a measurement result in an inspection process according toclaim 7, wherein the device comprises an identification unit for readinga lot number including a bar code, wherein the identification unit readsthe lot number and then adds the number to the measured data so as totransmit the data to the host, and wherein the processes managementserver includes the lot number in the produced result of assessing themeasured value.
 11. A lot processing system using the system ofdisplaying a measurement result in an inspection process according toclaim 7, the system comprising: a host that controls and manages adevice for inspecting a lot in each of a plurality of processes, whereinthe host does not transmit an instruction to transfer a correspondinglot or transmits an instruction to transfer the lot to a buffer, to atransferring portion connected to the host via network in case that aresult of assessing a measured value of the lot is abnormal whiletransmitting to the transferring portion an instruction to transfer thecorresponding lot and also transmitting to a processing device for anext process an instruction to start processing of the corresponding lotin case that the result of assessing the measured value is normal.
 12. Asystem of displaying a measurement result in an inspection process usinga network, the system comprising: a device that measures a lot based ona measurement condition corresponding to the inspection process so as toobtain measured data; and a host that intensively controls and managesthe device in one or a plurality of steps, the host further comprising:a device control server that transmits to the device via the network themeasurement condition of a lot determined to be used; and a processmanagement server that assesses the measured data, which is received viathe network, based on a predetermined assessment standard, and thenproduces a result of assessing a measured value so as to transmit theresult to the device, wherein the device provides a displaycorresponding to the result of assessing the measured value inaccordance with the received result of assessing the measured value anda previously registered display standard, wherein the device comprises afour color display unit including a first display portion, a seconddisplay portion, a third display portion and a fourth display portion ofcolors different from each other, and wherein the four color displayunit provides a display corresponding to the result of assessing themeasured value and a display showing an operating condition of thedevice operating or not operating, by lighting up, turning off orflashing four color of the four colors display unit.